Analytics inside the clean room

  • Microscope Nikon ME600
  • CMT-SR2000N-R 4-point Sheet resistivity mapping
  • TLM-setup for the measurement of contact resistance
  • M-Line-Spectroscopy Metricon
  • Filmetrics F20-UV - Thin-Film measurement system
  • Needle prober Cascade
  • Needle prober Süss
  • Particle microscope Leica
  • Stylus profilometer KLA-Tencor P-17
  • Various test setups for system testing under vacuum conditions (e.g. outgassing tests)
  • Various pressure measuring cells
  • Prism QMS 200 mass spectrometer

The following tools for surface and material characterization are shared with the materials engineering team.

  • Scanning electron microscope (SEM) LEO 1455 VP (incl. EDX)
  • Atomic force microscope (AFM) DI Dimension 3100
  • White light interferometer / confocal profilometer PLµ2300
  • X-ray diffractometer PANalytical X'Pert PRO MRD-XL
  • Fluorescence microscope
  • Shear tester and micro chevron tests

For a comprehensive characterization of our devices we build project-specific test setups.

  • Shear tester and micro chevron tests
  • Equipment for the characterization of fluidic components
    • Pressure controller Fluigent (1000 mbar und 345 mbar)
    • Syringe pumps
    • Various flow meters (3.7 nl/min to 1 ml/min)
    • Various small parts (valves, bubble traps, adapters and connectors)


IMP Institut für Mikrotechnik und PhotonikSenior Research Engineer, Fachverantwortlicher Packaging

+41 58 257 34