Analytics

Analytics inside the clean room

Microscope Nikon ME600
CMT-SR2000N-R 4-point Sheet resistivity mapping
TLM-setup for the measurement of contact resistance
M-Line-Spectroscopy Metricon
Filmetrics F20-UV - Thin-Film measurement system
Needle prober Cascade
Needle prober Süss
Particle microscope Leica
Stylus profilometer KLA-Tencor P-17

Vacuum analytics

Various test setups for system testing under vacuum conditions (e.g. outgassing tests)
Various pressure measuring cells
Prism QMS 200 mass spectrometer

Surface and material characterization

The following tools for surface and material characterization are shared with the materials engineering team.

Scanning electron microscope (SEM) LEO 1455 VP (incl. EDX)
Atomic force microscope (AFM) DI Dimension 3100
White light interferometer / confocal profilometer PLµ2300
X-ray diffractometer PANalytical X'Pert PRO MRD-XL
Fluorescence microscope
Shear tester and micro chevron tests

Specific test setups

For a comprehensive characterization of our devices we build project-specific test setups.

Shear tester and micro chevron tests
Equipment for the characterization of fluidic components
- Pressure controller Fluigent (1000 mbar und 345 mbar)
- Syringe pumps
- Various flow meters (3.7 nl/min to 1 ml/min)
- Various small parts (valves, bubble traps, adapters and connectors)