X-ray fluorescence spectrometry in vacuum (EDX-E)

The identification of light chemical elements (from boron, Z=5) requires an evacuated beam path, which is given in the scanning electron microscope. By reducing the diameter of the sample site down to the micrometre range, a high spatial resolution of the element information is possible. Special algorithms allow a standard-free quantitative element analysis of the locally determined X-ray spectrum.

IMP Institut für Mikrotechnik und PhotonikExperte für Schadensanalyse

+41 58 257 33 75jan.allaart@ost.ch